Ultra High Purity Filters
Introduction
FP Series Ultra High Purity Filters feature a removal rating of 0.003 µm. Designed with a PTFE filter element, these filters offer excellent chemical compatibility, making them ideal for filtering gases in various semiconductor manufacturing processes such as CVD, PVD, and dry etching.
Features
◎ Particle removal rating of ≥0.003 µm, with a filter efficiency greater than 99.9999999% at maximum flow rate
◎ Excellent chemical compatibility
◎ 100% helium leak tested
Technical Data
| Material | Filter Element | PTFE | |||
| Support | PFA | ||||
| Housing | 316L SS or 316L SS VAR | ||||
| Removal Rating | ≥0.003 µm | ||||
| Filter Efficiency (Log Reduction Value) | ＞99.9999999% (9LRV) | ||||
| Helium Leak Rate | ＜1×10 std·cm /s | ||||
| Recommended Work Flow Rate | 0~60 slpm (0~2.1 scfm) | 0~120 slpm (0~4.2 scfm) | 0~500 slpm (0~17.7 scfm) | 0~1000 slpm (0~35.3 scfm) | |
| Max. Working Pressure | 3000 psig (207 bar) | 1000 psig (68.9 bar) | |||
| Max. Negative Differential Pressure | 58 psig (4 bar) @23 °C | 87 psig (6 bar) @23 °C | |||
| Max. Working Temperature | 10 psig (0.7 bar) @23 °C | 44 psig (3 bar) @23 °C | |||
| Max. Positive Differential Pressure | -22 ~ 248 °F (-30 ~120 °C) | ||||
Flow Data
Dimensions
Introduction
FP Series Ultra High Purity Filters feature a removal rating of 0.003 µm. Designed with a PTFE filter element, these filters offer excellent chemical compatibility, making them ideal for filtering gases in various semiconductor manufacturing processes such as CVD, PVD, and dry etching.
Features
- Particle removal rating of ≥0.003 µm, with a filter efficiency greater than 99.9999999% at maximum flow rate
- Excellent chemical compatibility
- 100% helium leak tested
Technical Data
| Material | Filter Element | PTFE | |||
| Support | PFA | ||||
| Housing | 316L SS or 316L SS VAR | ||||
| Removal Rating | ≥0.003 µm | ||||
| Filter Efficiency (Log Reduction Value) | ＞99.9999999% (9LRV) | ||||
| Helium Leak Rate | ＜1×10 std·cm /s | ||||
| Recommended Work Flow Rate | 0~60 slpm (0~2.1 scfm) | 0~120 slpm (0~4.2 scfm) | 0~500 slpm (0~17.7 scfm) | 0~1000 slpm (0~35.3 scfm) | |
| Max. Working Pressure | 3000 psig (207 bar) | 1000 psig (68.9 bar) | |||
| Max. Negative Differential Pressure | 58 psig (4 bar) @23 °C | 87 psig (6 bar) @23 °C | |||
| Max. Working Temperature | 10 psig (0.7 bar) @23 °C | 44 psig (3 bar) @23 °C | |||
| Max. Positive Differential Pressure | -22 ~ 248 °F (-30 ~120 °C) | ||||
Flow Data
Dimensions
